Gases Used in the Photovoltaic Industry
PERC Process: TMA (Trimethylaluminum) 、 SiH₄ (Silane) 、 NH₃ (Ammonia) 、 N₂O (Nitrous Oxide)
TOPCon Process: BCl₃ (Boron Trichloride) 、 SiH₄ (Silane) 、 B₂H₆ (Diborane) 、 NH₃ (Ammonia) 、 PH₃ (Phosphine) 、 H₂ (Hydrogen)
HJT Process: NF₃ (Nitrogen Trifluoride) 、 SiH₄ (Silane) 、 B₂H₆ (Diborane) 、 PH₃ (Phosphine) 、 CO₂ (Carbon Dioxide) 、 H₂ (Hydrogen)
SCPW3000N
Digital sensor monitoring with high stability, enhanced safety, modular design, advanced automation, and easy maintenance.
Type
Plasma Scrubber
Main Application Process
MOCVD、EPI、SIC、SOLAR
Dimension
W1450 * D1300 * H2000 （mm）
Process Gas
H2、SiH4、CF4、TEOS、PFCs
Processing Capacity
3000 LPM
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